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Products
Menu
- Spectrometer
- Thermal Analyzer
- Thermal Conductivity Instrument
- Microfluidics Control System
- Dissolution System
- Biomolecular Interaction Analysis
- Particle Size Analyzer
- Microscope
- Mass Spectrometry Pretreatment
- Photometer
- oven
- Chamber
- Incubator
- Waterbath
- Instruments Accessory and Software
- Laboratory Related
Description
Fully automated accessories for semiconductor wafer analysis.
Specifications
There are 8 inch and 12 inch semiconductor chip size machines.
Features
1. Multi-position measurement can be automated
2. Can handle 2-12 inch semiconductor wafers
3. Sampling can be performed in specular reflection or transmission mode
4. Optional purge enclosure
Applications
Provide analysis of EPI, BPSG, carbon and oxygen content in the wafer
Options and Accessories
1. MappIR
2. MAP300
