Wafer Analysis

Fully automated accessories for semiconductor wafer analysis.

There are 8 inch and 12 inch semiconductor chip size machines.

1. Multi-position measurement can be automated
2. Can handle 2-12 inch semiconductor wafers
3. Sampling can be performed in specular reflection or transmission mode
4. Optional purge enclosure

Provide analysis of EPI, BPSG, carbon and oxygen content in the wafer

1. MappIR
2. MAP300